| Category | Parameter | Inner Frame | Middle Frame | Outer Frame |
|---|---|---|---|---|
| General | Rated Load Capacity | 150 kg-- | ||
| Temperature Range (Incubator) | Room temperature to 200 °C-- | |||
| Carrier Volume (for platform) | Length: 700 mm × Diameter: φ240 mm-- | |||
| Magnetic Field Environment | ≤ 3 Gs-- | |||
| Positioning | Position Repeatability | ±20″ | ±20″ | ±20″ |
| Position Accuracy | 20″ | 20″ | 20″ | |
| Position Resolution | 7.2″ | 7.2″ | 7.2″ | |
| Rate | Rate Range | ±0.1 to ±50 °/s | ±0.1 to ±50 °/s | ±0.1 to ±20 °/s* |
| Rate Resolution | 0.02 °/s | 0.02 °/s | 0.02 °/s | |
| Rate Accuracy & Stability (ω ≤ 50 °/s) | ≤ ±0.1% | ≤ ±0.1% | ≤ ±0.1% | |
| Rate Accuracy & Stability (ω ≤ 10 °/s) | ≤ ±0.5% | ≤ ±0.5% | ≤ ±0.5% | |
| Rate Accuracy & Stability (ω ≤ 1 °/s) | ≤ ±1% | ≤ ±1% | ≤ ±1% | |
| Dynamics | Angular Acceleration | 50 °/s2 | 50 °/s2 | 50 °/s2 |
| Geometry | Verticality (Inner vs. Outer) | - | - | ±5 arcsec |
